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Small intelligent type PECVD,PECVD-S-150A

China

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详情

Small intelligent type PECVD,PECVD-S-150A  
 
Main features
Small size,full functionSuitable for laboratory sample preparation and plasma treatment.
Set vacuum unit, gas supply system, RF source, automatic propulsion, heating furnace in on.All the controls are integrated into the touch screen control interface to make the device more intelligent and easy to operate.
Adjustable power range 0-150W; adjustable temperature range: 100-1200 degrees; adjustable sputtering region: 0-1000mm; application: metal film, ceramic film, composite film, continuous growth of various films, etc. Expandable plasma cleaning etching and other functions.
 
Furnace
Max. temp 1200°C
Heating zone length 440mm
Constant zone length 200mm
Temp. control PID automatic control with 30 steps programmableOperation interface is 7 "industrial control computer
Tube size 25,50optional
 
 
PE source:   
Signal frequency 13.56 MHz±0.005%
Power output range 0-150W
 
Gas supply system Accurate control of gas flow with high precision mass Flowmeter
Mass Flowmeter reference rangeN2) 100sccm200sccm 500sccm optional
Accuracy ±1.5%
Repeatability precision ±0.2%
Working pressure difference range 0.10.5 MPa
Max. pressure 3MPa
 
Vacuum unit KF25 series bellows and manual stopper valves
vacuum 10-1 pa
The value can be displayed intuitively by the digital display vacuum tester
 

联系我们

联系人: elaine

公司名称:Anhui BEQ Equipment Technology CoLtd

办公地址:Hefei, Anhui, China,

电话号码:

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