FOUP 13 slot M type (300mm / 12 inch)

详情

**0mm FOUP, Able to protect, deliver and store **0mm wafer, provide safe protection during delivery and storage. Reduce particle contamination of wafer, protect wafer from static electricity damage and then increase yield rate.

CKplas CK**0/CK**3 FOUP series of product line fully align with SEMI standard of automation interface, compatible with AMHS. Not only design for standard silicon wafer, but also for special thin wafer application, CK**0 FOUP create mini-environment to protect valuable wafer for transfer and storage purpose.