Electric heater type gas abatement system.:Perfect abatement efficiency for flammable &water solubl
Minimizing moisture vapor exhaust (Apply dry system):Excellent safety interlock system
Longer maintains cycle .Simple operation and easy maint:Relatively lower operation cost(Heater easy to PM)
详情
•Low
running cost Uses only electricity and water,
therefore it is easy tomanage, making it
possible to reduce running cost
dramatically.
•Install anywhere, including a clean
roomdeposition gas with a comparably low
decompositiontemperature.•IPI series standard
model:Auto purifying function is a standard
feature.EasymaintenanceWet-Thermal-wet SGA***0AWet-Thermal-wet SGA***0BSWet-Thermal-wet SGA***0BT
