China
联系人 Mr. Bert
yuhua district,huaian road no96, Shijiazhuang, Hebei
|
Material |
Fused silica/Borofloat/B**0 etc |
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|
spec |
unit |
3" |
4" |
5" |
6" |
|
|
Diameter/size(or
square) |
mm |
*6.2 | **0 | **5 | **0 | |
|
Tol(±) |
mm |
0.*5 | 0.5 | 0.5 | 0.5 | |
|
Thickness |
mm |
0.*0mm or more |
0.*8mm or more |
0.*0mm or more |
0.*0mm or more |
|
|
Primary reference
flat |
mm |
*2mm or
customized |
*2.5mm or
customized |
*2.5mm or
customized |
*7.5mm or
customized |
|
|
LTV (5mmx5mm) |
µm |
< 2 |
< 2 |
< 2 |
< 2 |
|
|
TTV |
µm |
< 8 |
< *0 |
< *5 |
< *0 |
|
|
Bow |
µm |
±*0 |
±*5 |
±*0 |
±*0 |
|
|
Warp |
µm |
≤ *0 |
≤ *0 |
≤ *0 |
≤ *0 |
|
|
PLTV |
% |
≥*0%(5mm*5mm) |
≥*0%(5mm*5mm) |
≥*0%(5mm*5mm) |
≥*0%(5mm*5mm) |
|
|
Edge Rounding |
mm |
Compliant with SEMI M1.2
Standard/refer to IEC****6 |
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|
Surface Type |
Single Side Polished /Double
Sides Polished |
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|
Polished side Ra |
nm |
≤1 |
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|
Back Side
Criteria |
µm |
general 0.**0.5 or as
customized |
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|
Appearance |
Contamination, |
None |
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|
Particles
￠>0.3
µ m |
<= *0 |
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|
Saw Marks,
striations |
None |
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|
Scratch |
None |
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|
Cracks, crowsfeet, saw
marks, stains |
None |
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| 国家: | China |
| 型号: | 3''4''6''8'' |
| 离岸价格: | 获取最新报价 |
| 位置: | - |
| 最小订单价格: | - |
| 最小订单: | - |
| 包装细节: | - |
| 交货时间: | - |
| 供应能力: | - |
| 付款方式: | - |
| 產品組 : | - |
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