Sapphire wafer A-plane R-plane M-plane semipolar /nonpolar

详情

Sapphire wafer A-plane R-plane M-plane semipolar /nonpolar
 
Specification:
Material: >*9.**9% , High Purity, Al2O3
Orientation: A-axis(***0) ±0.1°
Orientation: R-axis(***2) ±0.1°
Orientation: M-axis(***0) ±0.1°
Orientation: C-plane off 1~4 degree toward A-plane/ M-plane
Diameter: *0.8 +/- 0.1mm (2inch)
Thickness: **0 +/**5um
Surface roughness:
Front Side: Epi-Polished, Ra≤0.2nm
Back Side: Epi-Polished, Ra≤0.2nm (SSP)
Fine ground Ra=0.**1.2um (DSP)
TTV: <*0 um
BOW: <*0 um
Warp : <*0 um
Class **0 Clean room cleaning and vacuum nitrogen packaging,