1.The turbo molecular pumping
station of vacuum pump unit a.shall be
an all-in-one system. b.shall be
capable of stable pumping capacity. c.shall
attain an ultimate vacuum of better that 0.5
mbar. d.shall be
quiet, operating at a noise level less than *0
dB. e.shall
operate at standard voltage.
2.Second roots pump of vacuum pump
unit a.shall
have an ultimate vacuum of better than 0.5 mbar in continuous
operation. b.shall be
quiet, operating at a noise level less than *0
dB. c.shall
operate at standard voltage. d.shall be
of complete, oil-less design. e.shall
have a readily available rebuild kit for purchase.