Mass Flow Controller

详情

MEMC***0A Smart Gas Mass Flow Controller
Core tech: fluid dynamics design, MEMS sensing, adaptive signal processing
Pressure: *2, *4, *6, *8, *0 (*0.1MPa)
Flow rate: 1~**0; 3~**0; 5~**0; *0~***0 SLPM
Temperature: **0~*0℃
Flow coefficient Cv range: 4.0****4 ~ 1.6****2
Range ratio: > 1:*0
Response time: < *0ms (****0% F.S.)
Stabilization time: < 1s (****0% F.S.)
Accuracy level: ±1% F.S.
Repeatability: < 0.*5% F.S.
Sensitivity: < 0.1% F.S.
Communication: RS**5 / ***0mA