AW-105R Plasma Asher Plasma Descum

详情

The AW***5R single-wafer photoresist asher and descum is an automated tool designed as a flexible *3.*6MHz RF Parallel Plate plasma photoresist removal and descum system for high-volume wafer fabrication. The AW***5R is in direct response to manufacturers concerns for wafer uniformity, uptime, reliability and production-proven technology.
AW***5R Configuration:
       Main Frame with Circuit Breakers, Solenoid Valves
       Pentium Class PC with AW Software
       Keyboard, Mouse, USB SW backup, and Cables
       Chuck /w Heat, Pump Ring ,Lift Pins

• ① **4 inch; ② **6 inch;③ **6 inch;④ 6.**5 inch;⑤ 6.*5 inch

• ① Two Dimensions   ② Four Dimensions

• ① **0W    ② **0W

• ① One MFC; ② Two MFCs; ③ Three MFCs