Perkin-Elmer 4400 Perkin-Elmer 4410 Perkin-Elmer 4450 Sputter

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( Negotiable )

1 Unit Minimum Order

国家:

USA

型号:

Perkin-ELmer 44XX Series Sputter Deposition Equipment

离岸价格:

( Negotiable )（面議）获取最新报价

位置:

最小订单价格:

最小订单:

1 Unit

包装细节:

Standard Crating

交货时间:

12 weeks

供应能力:

200 Unit per Year

付款方式:

T/T

產品組 :

Sputtering Deposition

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Allwin21 Corp.

USA

免费会员

联系人 Mr. Peter

220 Cochrane Circle, Morgan Hill, California

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产品规格

Made in U.S.A.:Production proven equipment
Much better performance with Allwin21 new controller:No obsolete parts issue

详情

With an installed base of more than thousands of systems, Perkin-Elmer was a leading supplier of sputter deposition equipment for high technology application in ***0's. The Perkin-Elmer ***0 Series, fully refurbished and upgraded by Allwin*1 Corp., were designed for flexibility offering a wide range of operating and process modes. The highest quality construction, components and Allwin*1's new AW****0 System Control assure reliable operation and an ultra clean vacuum environment to yield consistently reproducible results. Every fully refurbished and upgraded Perkin Elmer sputtering system was supported by years of technological experience and backed by a worldwide sales and service organization dedicated to prompt courteous service

Perkin-Elmer ***0, ***0, ***0Proven Sputter Materials:
Al+W ,Cr/SiO2,SiC ,Ti+Au,InSnO ,SiO2 ,Ti/W ,Ti+Au+Ni,Al2O3 ,Mo ,SiO2+O2 ,Ni/Fe+Cu+SiO2,Ag MoSi2 ,Si+N2(Si3N4) ,Ti/W+Au,Au ,Mo2Si5 ,Si+N2+B4C, Ti/W+Au+Ta, C, Mo5Si3 ,Ta ,Ti/W+Al/Si,Cr Ni ,TaC, Ti/W+Ni/Cr+Au,Cr/Co ,Ni/Cr, Ta+Au , Ti/W+Pt,Cr/Au, Ni+Ni/Cr, TaSi2 ,Al+Ti/W+Ag, Cr+Cu, Ni/Fe ,Ta+SiO2 , W+Al2O3,Cr/Si ,Pt, Zr ,Zn,Cr/SiO, TiO2 ,TiO2+Cr, ZnO2
Perkin-Elmer ***0, ***0, ***0 Sputter Key Features:

Production-proven sputter technology
Optimum AW****0 System Control
DC *4V for Motors, Actuator, Relay, Solenoid
Efficient 8" Delta cathodes, 2 to 6" option
Full Pallet rotation control with indexing
High Uniformity and Yield
DC, RF Sputter, Pulse DC option
Magnetron and Diode Sputter option
RF Etch and Bias are optional
Ultra Clean vacuum system
Load lock operation
UHV design
Flexible for development or production use
Full range of substrate sizes and shapes
Various pumping and power options
Co-sputtering option
Reactive Sputtering option
Made in U.S.A.

Perkin-Elmer ***0, ***0, ***0 Sputter Software Key Features:

Maintenance, Manual, Semi Automatic and Fully Automatic modes.
Automated calibration of all subsystems.
Troubleshooting to subassembly levels.
Programmed comprehensive calibration and diagnostic functions.
Recipe creation for full automatic wafer processing.
Automatic decline of improper recipes and process data s.
Multi-level password protection.
Storage of multiple recipes and system functions.
Real-Time process graphics, data acquisition display, and analysis.
Process Data and Recipe storage automatically to hard drive.
Easy TC vacuum gauge calibration.
Positioning Deposition (optional)
GEM/SECS II (optional)

Perkin-Elmer ***0, ***0, ***0 Configuration:

Main Frame
*8" dia. SST chamber top plate with ports for *-inch(4) circle or Delta (3) Cathodes
Sputter Power Supply,DC or RF or Pulse DC power, RF: **3KW; DC: 5KW or *0KW

Process Chamber

8" diameter X *2" high stainless steel cylinder with 6"
CF flange viewport and load lock port
*8" diameter stainless steel base plate
*1/2" air-operated roughing isolation valve
Air-operated gas inlet valve
Air-operated vent valve
*1/2"blanked-off leak check port
Removable deposition shields
*3" diameter, *-position water-cooled annular substrate table with variable-speed motorized table drive
Full circle shutter and vane shutter
Chain drive pallet carrier transport
Heavy duty electric hoist

Load lock

*0" x *8" x 8" stainless steel load lock chamber with aluminum cover
Chain drive pallet carrier transport
2" air-operated roughing isolation valve
Air-operated vent valve
*3" diameter molybdenum annular substrate pallet
Elevator for pallet up and down function.

Vacuum Systems for process Chamber

2 stage Cryo pump with ***0 l/s pumping speed for air, including chevron, water-cooled compressor and lines, automatic regeneration controller and plumbing kit. *1/2" O.D. (6" ASA) aluminum air-operated gate valve Air-operated venetian blind throttling valve.
*6.7 cfm mechanical pump or dry pump for process chamber and load lock (Optional)

1 gas line with MFC(Ar, **0 SCCM or Customized)
New Controller: Allwin*1 Corp.'s AW****0 System PC Control
New Power Distribution Box: AC**0V /**8V/ 3Phase

Perkin-Elmer ***0, ***0, ***0 Sputter Options:

GEM/SECS II function (Software)
More gas lines with MFC(① N2;② O2;③ Customized)
Lamp tower alarm with buzzer.
Mechanical pump or dry pump for process chamber and load lock.
Independent mechanical pump or dry pump for process chamber.
Chiller for Cooling plates and table.
Turbo pump for load lock.
Load lock Lamp Heating function, Up to **0°C
Chamber Lamp Heating function, Up to **0°C (Use one cathode port in SST chamber top plate).
Plasma etch function (before sputter)
Bias function
Co-sputter function
Reactive sputter function
Transformer for AC **0V to **8V for DC Power Supply (if necessary).

国家:	USA
型号:	Perkin-ELmer 44XX Series Sputter Deposition Equipment
离岸价格:	( Negotiable ) （面議）获取最新报价
位置:	-
最小订单价格:	-
最小订单:	1 Unit
包装细节:	Standard Crating
交货时间:	12 weeks
供应能力:	200 Unit per Year
付款方式:	T/T
產品組 :	Sputtering Deposition