Four Grades of Ultra-pure
Etchant/Cleanout Fluid/Stripper/Developer
UPSS Grade Single
Metal Impurity less than 0.1ppb
The same level as SEMI Grade 4
Filter 0.2 micron particles UPS Grade
Single Metal Impurity less than 1ppb
The same level as SEMI Grade 3
Filter 0.2 micron particles UP
Grade Single Metal Impurity less than
*0ppb
The same level as SEMI Grade
2
Filter 0.2 micron particles EL
Grade Single Metal Impurity less than
**0ppb
The same level as SEMI Grade 1
Filter 0.2 micron particles
