Smif Specification Lpi

详情

Wafer Size: **0mm
Cassette Pick-up Position: **9mm (*5.8 inches) 
Cassette Positioning: To within ±0.**5 inches (vertical)
SMIF-Pod Load Height: **0mm (*5.5 inches)
Nominal Maximum Reach of Load Arm: (Measured from front face of LPT to H-bar of SMIF-Pod) **7mm (*2.*0 inches)
Reversed Cassette Orientation Height: ***8mm (*2.*3 inches) Width: **7mm (*8.*0 inches) Depth: **8mm (*8.*1 inches) Weight: (Without SMIF-Pod, cassette, wafers) **0 pounds(*7.*7kg)
Speed of travel (Minienvironment): *7.2mm (2.*5 inches)
per second Mounting: Tool mount. May make use of an interface frame calibrated to lock the LPT into a repeatable position onto the Process Tool. Power: 3.5 Amp (******0vac) 2 Amp (**0vac) Laser NOTE:LPT is a Class I Laser product when used with a SMIF-Pod Diode Laser; Wavelength = **0 nm Laser Power = <1mW (Class II) Communications: Serial RS***2C (SECS I / SECS II), RS***5 (optional), Bi-directional Parallel LAN
Transmission cycle<*0s; Repositioning accuracy of 0.**7mm; The cleanliness level is superior to Class 1;
Direction error<0.2mm
Mature and stable Interlock system
Wafer Traceable Identification System SMART TAG
Integrated self diagnosis and advanced diagnostic software for easy design and troubleshooting.