Wafer Vacuum Transfer Module (VTM300)

详情

Wafer Vacuum Transfer Module (VTM)

The Vacuum Transfer Module (VTM) is used in vacuum processes such as wafer etching, deposition (CVD, PVD, ALD), etc. Due to the stringent requirements of the process environment, the transfer equipment VTM needs to meet ultra-high vacuum, ultra-low vibration, corrosion resistance, high-temperature resistance, and other requirements.