Smif Versaport

详情

characteristics:
Compatible with **0mm POD and open castte crystal boxes;
Accurate and reliable motion control, capable of opening, closing, and sealing the conveyor door Automatic fault prevention device, including cassette slot/wafer mapping, stack detection, wafer protrusion sensing, and automatic wafer repositioning;
SMART TAG Traceable Identification System for Wafer Boxes and Wafers ;
Integrated self inspection diagnosis and advanced diagnostic software for easy design and troubleshooting;
Advantages:
Localization of components, short delivery time, and stable supply;
Localized professional technical service team with quick response;

Transmission cycle<*0s; Repositioning accuracy of 0.**7mm;
The cleanliness level is superior to Class 1;
Direction error<0.2mm;
Mature and stable Interlock system;
Wafer Traceable Identification System SMART TAG;
Integrated self diagnosis and advanced diagnostic software for easy design and troubleshooting;