Wafer vacuum Transfer Module Robot

详情

VTM Core parts -wafer vaccum transfer module ( Hong Hu self-research )
Honghu vaccum transfer module introduction
R (radial) axis:
Measuring range: ***0mm
Repeatability: ±0.*5mm
T (rotation) axis:
Range: Infinite rotation
Repeated positioning accuracy: ±0.**3°
Z (vertical) axis: *0mm, **0mm, **0mm
Repeated positioning accuracy: ±0.*5mm
Leakage rate: <1****9 std.cc/sec-He
Base Vaccum: <5****7 vaccum
Particle Perfermence: ISO Level 1
Power Supply: *5 to **5VAC/*0HZ, 2.*5A/**0VAC
Communication: Ethernet Teach Method: Teach Pendant and Robot Studio Software
Operating temperature: *0ºC**0ºC
Storage temperature: **5ºC to *0ºC
Humidity: *0% to *0% (non-condensing)